产品概述 Product Overview
中空磁耦合旋转驱动具有一个可以旋转的内中空轴，两端采用CF法兰结构，可使电、流体或其他运动穿过驱动器。
该款旋转驱动产品可以承受一定重量的负载。
Hollow Shaft Magnetic Coupled Rotary Feedthrough has a rotatable internal hollow shaft, and each drive terminates with a CF flange at the rear enabling services such as electric, fluid or an extra motion to be passed through the drive.
The rotary feedthrough is designed to carry heavy load on the hollow shaft.
规格说明 Specification
● 驱动方式：磁耦合
| ● 极限真空：可达10-11 mbar
| ● 烘烤温度：150°C
|
● 旋转范围：360°(可连续旋转)
| ● 激光蚀刻刻度，以1°递增
| ● 材质：超高真空兼容材料
|
● 低负载下没有回程差
| ● 上端安装法兰：CF法兰，螺纹孔
| ● 下端安装法兰：CF法兰，通孔 |
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|
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| 法兰尺寸
| 驱动方式
| 分辨率
| 重量
| 型号
|
| 毫米
| 英寸
|
| 70
| 2.75
| 手动
| 1°
| 3.0
| HSR35M
|
| 步进电机
| 0.1°
| 5.0
| HSR35A
|
114
|
4.5
| 手动
| 1°
| 6.9
| HSR63M
|
| 步进电机
| 0.1°
| 8.0
| HSR63A
|
产品尺寸 Dimension Drawing
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